Opto-Electronic Engineering, Volume. 31, Issue 8, 12(2004)

The bonding process for a novel micro-deformable mirror

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    References(4)

    [1] [1] TYSON R. Principles of Adaptive Optics: 2nd ed[M]. New York: Academic Press, 1998.

    [3] [3] THORBURN W, KAPLAN L. A low voltage electro-distortive mirror system for wavefront- control, Active and Adaptive Optical Components[J]. SPIE, 1991,1543: 52-58.

    [5] [5] MADOU M. Fundamentals of microfabrication: the science of miniaturization: 2nd ed[M]. Boca Raton, Fla.: CRC Press, 2002.

    [6] [6] VDOVIN G, MIDDELHOEK S, SARRO P. Technology and applications of micromachined adaptive mirrors[J]. J. Micromech. Microeng, 1999, 9(5): 8-19.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. The bonding process for a novel micro-deformable mirror[J]. Opto-Electronic Engineering, 2004, 31(8): 12

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    Paper Information

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    Received: Sep. 18, 2003

    Accepted: --

    Published Online: Nov. 14, 2007

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