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Opto-Electronic Engineering, Volume. 31, Issue 8, 12(2004)

The bonding process for a novel micro-deformable mirror

[in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]2
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  • 1[in Chinese]
  • 2[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. The bonding process for a novel micro-deformable mirror[J]. Opto-Electronic Engineering, 2004, 31(8): 12

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    Paper Information

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    Received: Sep. 18, 2003

    Accepted: --

    Published Online: Nov. 14, 2007

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology