Fabrication of multi-wavelength visible and infrared filter for solar atmosphere tomographic imaging

Mingdong Kong; Chun Guo; Bincheng Li; Wenyan He; Ming Wei

doi:10.3788/COL201715.123101

Chinese Optics Letters, Volume. 15, Issue 12, 123101(2017)

Fabrication of multi-wavelength visible and infrared filter for solar atmosphere tomographic imaging

Mingdong Kong^1,2, Chun Guo^1、*, Bincheng Li^1,3, Wenyan He^1,2, and Ming Wei¹

Author Affiliations

¹Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China

²University of Chinese Academy of Sciences, Beijing 100039, China

³School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China

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Figures & Tables(7)

$(Color online) Refractive indexes of Ta2O5, SiO2, and fused silica substrate for the design of a multi-wavelength filter.$

Fig. 1. (Color online) Refractive indexes of Ta2O5, SiO2, and fused silica substrate for the design of a multi-wavelength filter.

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Fig. 2. (Color online) (a) Calculated transmittance of thin film on side A without backside coating. (b) Layer thickness profile of optical coating for side A. (c) Calculated transmittance of thin film for side B without backside coating. (d) Layer thickness profile of optical coating on side B.

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Fig. 3. (Color online) Transmittance spectra of two experimental runs and theoretical design for the multi-wavelength filter coated on side A.

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Fig. 4. (Color online) Transmittance spectra of the two-side-coated multi-wavelength filter, and after temperature and humidity tests.

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Table 1. Deposition Parameters for the Ta2O5 and SiO2 Films
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Table 1. Deposition Parameters for the Ta2O5 and SiO2 Films
Material Temperature (°C) Deposition rate (nm/s) Bias voltage (V) Discharge current (A) Gas flow (sccm)
$O_{2}$ Ar
${Ta}_{2} O_{5}$ 200 0.5 130 50 15 10
${SiO}_{2}$ 1.0 140 5

Table 2. Temperature Test Parameters
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Table 2. Temperature Test Parameters
Temperature (°C) Test Time (h) Rate of Temperature Change (°C/min)
Temperature test 65 2 $< 2$
$- 40$ 2 $< 2$

Table 3. Humidity Test Parameters
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Table 3. Humidity Test Parameters
Temperature (°C) Relative Humidity (%) Test Time (h)
Humidity test 60 95 72

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Mingdong Kong, Chun Guo, Bincheng Li, Wenyan He, Ming Wei. Fabrication of multi-wavelength visible and infrared filter for solar atmosphere tomographic imaging[J]. Chinese Optics Letters, 2017, 15(12): 123101

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