Optics and Precision Engineering, Volume. 21, Issue 10, 2648(2013)

Precise axial adjustment mechanism with 6-PSS type of optical elements

GUO Kang* and GONG Yan
Author Affiliations
  • [in Chinese]
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    References(14)

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    [8] [8] GUO K, GONG Y, NI M Y, et al.. Design of a monolithic apparatus for the axial fine adjustment of optical element [J]. Acta Optica Sinica, 2012,32(S1):s122002. (in Chinese)

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    CLP Journals

    [1] ZHANG De-fu, LI Xian-ling, DONG Li-jian, SUN Zhen. Coupling Error Inhibition of Eccentric Adjustment Mechanism Design in Lithographic Objective Lens[J]. Acta Photonica Sinica, 2015, 44(9): 922001

    [2] CHEN Huanan, GUO Kang, ZHANG Linghua, LIU Jian, SHANG Hongbo. Designing for Flexure-based X-Y Adjusting Mechanism of Lithograph Projection Objective[J]. Opto-Electronic Engineering, 2015, 42(6): 50

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    GUO Kang, GONG Yan. Precise axial adjustment mechanism with 6-PSS type of optical elements[J]. Optics and Precision Engineering, 2013, 21(10): 2648

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    Paper Information

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    Received: Mar. 26, 2013

    Accepted: --

    Published Online: Nov. 1, 2013

    The Author Email: Kang GUO (guok@sklao.ac.cn)

    DOI:10.3788/ope.20132110.2648

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