Chinese Physics B, Volume. 29, Issue 10, (2020)

Optimization of terahertz monolithic integrated frequency multiplier based on trap-assisted physics model of THz Schottky barrier varactor

Lu-Wei Qi1...2,3, Jin Meng2, Xiao-Yu Liu1, Yi Weng1, Zhi-Cheng Liu1, De-Hai Zhang2,†, Jing-Tao Zhou1 and Zhi Jin1 |Show fewer author(s)
Author Affiliations
  • 1Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 00029, China
  • 2National Space Science Center, the Chinese Academy of Sciences, Beijing 100190, China
  • 3University of Chinese Academy of Sciences, Beijing 100190, China
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    Figures & Tables(11)
    (a) Optical microscopy image of a fabricated SBV. The SEM photographs of Schottky metal-brim structure details are added. (b) SBV with Schottky metal-brim. (c) Conventional SBV.
    Energy band diagram of MIS structure.
    (a) Forward I–V characteristics with different structures in log scale (similar with diameter @3 μm). (b) Reverse breakdown characteristics with different structures.
    Comparison of the measured C–V curves of the SMB-SBV structure and simulated curves based on different models.
    Equivalent circuit of the 215 GHz TMIC tripler.
    (a) SEM image of a fabricated tripler TMIC chip. (b) SEM image of a pair of varactors in parallel.
    Photo of test-site about 215 GHz tripler TMIC.
    (a) Measured input and output power as a function of frequency. (b) Measured output power and efficiency as a function of input power at different frequency.
    Comparison of the measured efficiency and simulated curves based on different physics-based C–V models.
    • Table 1. Key parameters of the modified model.

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      Table 1. Key parameters of the modified model.

      ParameterValue
      Dielectric-layer thickness δ/nm0.256
      Interface acceptor density Dit/cm2⋅eV2.7 × 1012
      Dielectric constant[21]4.0
      Capacitance ideal coefficient η0.7
      Correction term D10.36
    • Table 2. Performance comparison of the frequency multipliers based on TMIC.

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      Table 2. Performance comparison of the frequency multipliers based on TMIC.

      ReferencesTechnologyFrequency/GHzMax output power/mWEfficiency
      UESTC[27]Tripler TMIC330–5000.192%(max)
      ICET[28]Membrane tripler TMIC4300.2154.3%(max)
      VDI[29]Tripler TMIC140–2203%(typical)
      CETC[30]Tripler TMIC325–5000.454.4%(max)
      This paperSMB-structure tripler TMIC21510.24.5%(max)
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    Lu-Wei Qi, Jin Meng, Xiao-Yu Liu, Yi Weng, Zhi-Cheng Liu, De-Hai Zhang, Jing-Tao Zhou, Zhi Jin. Optimization of terahertz monolithic integrated frequency multiplier based on trap-assisted physics model of THz Schottky barrier varactor[J]. Chinese Physics B, 2020, 29(10):

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    Paper Information

    Received: Apr. 14, 2020

    Accepted: --

    Published Online: Apr. 21, 2021

    The Author Email: Zhang De-Hai (zhoujingtao@ime.ac.cn)

    DOI:10.1088/1674-1056/abab74

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