Optics and Precision Engineering, Volume. 25, Issue 11, 2835(2017)

Cleaning of carbon contamination on multilayer optics of EUVL

SONG Yuan*... LU Qi-peng, GONG Xue-peng, WANG Yi and PENG Zhong-qi |Show fewer author(s)
Author Affiliations
  • [in Chinese]
  • show less
    Figures & Tables(0)
    Tools

    Get Citation

    Copy Citation Text

    SONG Yuan, LU Qi-peng, GONG Xue-peng, WANG Yi, PENG Zhong-qi. Cleaning of carbon contamination on multilayer optics of EUVL[J]. Optics and Precision Engineering, 2017, 25(11): 2835

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Mar. 27, 2017

    Accepted: --

    Published Online: Jan. 17, 2018

    The Author Email: SONG Yuan (songyuan_SHOW@126.com)

    DOI:10.3788/ope.20172511.2835

    Topics