Optics and Precision Engineering, Volume. 25, Issue 11, 2835(2017)
Cleaning of carbon contamination on multilayer optics of EUVL
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SONG Yuan, LU Qi-peng, GONG Xue-peng, WANG Yi, PENG Zhong-qi. Cleaning of carbon contamination on multilayer optics of EUVL[J]. Optics and Precision Engineering, 2017, 25(11): 2835
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Received: Mar. 27, 2017
Accepted: --
Published Online: Jan. 17, 2018
The Author Email: SONG Yuan (songyuan_SHOW@126.com)