Fig. 1. Three kinds of stacking structures of multilayer piezoelectric actuators^{[8, 10, 13]}. (a) Longitudinal stack; (b) transversal stack; (c) shear stack; (d) typical shape of multilayer piezoelectric actuators

Fig. 2. Fig.‍ 2‍　Structural diagram of multilayer piezoelectric actuator of TWINSCAN NXT lithography scanner^[23]

Fig. 3. Schematic of walking action of the piezoelectric actuator legs^［27］

Fig. 4. Schematic of piezoelectric actuated “I-MAC” system adopted by Nikon lithography projection lens^[28]

Fig. 5. Three dimensional model of X-Y direction flexible adjustment mechanism of moving mirror in lithography projection lens^[29]

Fig. 6. Structural of piezoelectric driven reticle assist device^[34]

Fig. 7. STACIS III piezoelectric active vibration isolator produced by TMC company of the United States^[40]

Fig. 8. Structural of piezoelectric vibration isolator^[43]