Laser & Optoelectronics Progress, Volume. 59, Issue 9, 0922024(2022)
Application of Multilayer Piezoelectric Actuator in Lithography Scanners
Multilayer piezoelectric actuator has the advantages of small volume, fast response, large stiffness, high displacement accuracy, and large driving force output, which is extensively utilized in the development of lithography scanners. This paper briefly introduces the basic structure and characteristics of multilayer piezoelectric actuator, and lists the typical applications of piezoelectric actuator in high-precision adjustment of projection lens of lithography scanners, positioning of reticle stage, and active vibration isolation of lithography scanners. Finally, the development direction of multilayer piezoelectric actuator is prospected.
Get Citation
Copy Citation Text
Gang Du, Xiaoxu Kang, Jiangtao Zeng, Tao Zeng. Application of Multilayer Piezoelectric Actuator in Lithography Scanners[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922024
Category: Optical Design and Fabrication
Received: Mar. 23, 2022
Accepted: Apr. 7, 2022
Published Online: May. 10, 2022
The Author Email: Zeng Tao (zengtao@srim.com.cn)