Optics and Precision Engineering, Volume. 29, Issue 9, 2101(2021)
Rapid fabrication of hollow double helix microrobot using femtosecond laser dynamic holograpic method
Figures & Tables(10)
Fig. 2. Computer generated hologram of Bessel beam off-axial superposition interference
Fig. 3. Light field analysis of four Bessel beam superposition interference
Fig. 4. Light field analysis of different number Bessel beam superposition interference
Fig. 5. Four side lobe ring fabricated by superposition Bessel light
Fig. 6. SEM images of ring structures with side lobes processed by different holograms：（a） and （b） are the results obtained by changing the superposition Bessel number； （c） and （d） are the processing results with
Fig. 7. Hollow double helix microrobot fabricated by femtosecond laser dynamic holography
Fig. 8. Microrobot driven by rotating magnetic field in microfluidic environment
Table 1. 参数与结构的圆环直径和侧瓣宽度的对应关系
View tableView in ArticleTable 1. 参数与结构的圆环直径和侧瓣宽度的对应关系
可控参数 加工结构的圆环 直径/µm 加工结构的侧瓣 宽度/µm 瓣数 2 3 2 3 400 11.60 13.60 7.60 8.68 500 10.56 12.52 10.92 12.19 600 9.20 11.90 7.04 8.24
Table 2. Parameter
n corresponds to diameter of ring and width of side lobeView tableView in ArticleTable 2. Parameter
n corresponds to diameter of ring and width of side lobe可控参数n 加工结构的圆环 直径/µm 加工结构的侧瓣 宽度/µm 瓣数 2 3 2 3 0 10.56 12.52 10.92 12.19 3 11.00 12.80 8.00 11.63 5 10.80 12.80 7.22 10.22 7 10.94 12.91 6.80 9.73 9 10.80 12.82 5.64 8.25 11 10.72 12.95 4.72 7.64
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Bo-wen SONG, Jia-wen LI. Rapid fabrication of hollow double helix microrobot using femtosecond laser dynamic holograpic method[J]. Optics and Precision Engineering, 2021, 29(9): 2101
Paper Information
Category: Micro/Nano Technology and Fine Mechanics
Received: Mar. 10, 2021
Accepted: --
Published Online: Nov. 22, 2021
The Author Email: LI Jia-wen (jwl@ustc.edu.cn)
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