Fig. 1. Structure and process flow of SHJ solar cell

Fig. 2. SEM image of as-cut silicon wafer， wafer after saw damage etch， incompletely textured wafer， pyramid surface etched in 2% and 6% alkaline solutions and after chemical polishing

Fig. 3. Reflectivity of original and textured wafers， MCL of passivated wafers affected by chemical polishing， pyramidsize and a-Si：H deposited at different temperatures

Fig. 4. Performances of SHJ solar cells