Acta Optica Sinica, Volume. 42, Issue 17, 1712004(2022)

Ultra-Precision Manufacturing Technology of High Power Laser Optics

Qiao Xu, Xianhua Chen*, Shengfei Wang, Bo Zhong, Ruiqing Xie, and Jian Wang
Author Affiliations
  • Research Centre of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, Sichuan, China
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    A high power solid laser facility used for inertial confinement fusion (ICF) demands over ten thousands of large aperture optics. Extremely precise machining accuracy specified over a continuous range of spatial frequencies (μm-1 level to m-1 level) as well as high resistance to laser damage is the fundamental requirement for high power laser optics. Advanced and deterministic optical manufacturing technologies are the basis to realize mass manufacturing of the large aperture laser optics. In this review, recent progresses in the ultra-precision manufacturing technologies and equipment for high power laser optics are summarized. Advances of ultra-precision grinding, rapid conformal polishing, deterministic polishing, ultra-precision fly-cutting, and low-density defect manufacturing technologies are emphasized. Besides, future developments of fabrication of high power laser optics are analyzed.

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    Qiao Xu, Xianhua Chen, Shengfei Wang, Bo Zhong, Ruiqing Xie, Jian Wang. Ultra-Precision Manufacturing Technology of High Power Laser Optics[J]. Acta Optica Sinica, 2022, 42(17): 1712004

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jun. 10, 2022

    Accepted: Aug. 2, 2022

    Published Online: Sep. 16, 2022

    The Author Email: Chen Xianhua (chenmail2@163.com)

    DOI:10.3788/AOS202242.1712004

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