Acta Optica Sinica, Volume. 33, Issue 11, 1111002(2013)
Influence of the Axial Component of Mask Diffraction Spectrum on Lithography Imaging
Figures & Tables(0)
Tools
Get Citation
Copy Citation Text
Dong Lisong, Li Yanqiu, Guo Xuejia. Influence of the Axial Component of Mask Diffraction Spectrum on Lithography Imaging[J]. Acta Optica Sinica, 2013, 33(11): 1111002
Paper Information
Category: Imaging Systems
Received: Apr. 1, 2013
Accepted: --
Published Online: Oct. 20, 2013
The Author Email: Lisong Dong (donglisong@bit.edu.cn)
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20