Infrared and Laser Engineering, Volume. 44, Issue 12, 3507(2015)

Automatic alignment of multiplexed beams of excimer laser MOPA system based on crosshair array

Shao Bibo*, Ma Lianying, Qian Hang, Wang Dahui, Zhao Xueqing, Zhang Yongsheng, Feng Gang, and Yi Aiping
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    Shao Bibo, Ma Lianying, Qian Hang, Wang Dahui, Zhao Xueqing, Zhang Yongsheng, Feng Gang, Yi Aiping. Automatic alignment of multiplexed beams of excimer laser MOPA system based on crosshair array[J]. Infrared and Laser Engineering, 2015, 44(12): 3507

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    Paper Information

    Category: 激光技术及应用

    Received: Apr. 9, 2015

    Accepted: May. 8, 2015

    Published Online: Jan. 26, 2016

    The Author Email: Bibo Shao (shaobibo@nint.ac.cn)

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