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Acta Optica Sinica, Volume. 35, Issue 1, 105002(2015)

Design of a Varied-Line-Space Plane Grating in EUV Spectrum

Jiang Yanxiu1,2、*, Bayanheshig1, Yang Shuo1,2, Zhao Xulong1,2, Li Wenhao1, and Wu Na1
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    Jiang Yanxiu, Bayanheshig, Yang Shuo, Zhao Xulong, Li Wenhao, Wu Na. Design of a Varied-Line-Space Plane Grating in EUV Spectrum[J]. Acta Optica Sinica, 2015, 35(1): 105002

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    Paper Information

    Category: Diffraction and Gratings

    Received: Jul. 21, 2014

    Accepted: --

    Published Online: Dec. 29, 2014

    The Author Email: Yanxiu Jiang (jiangyanxiup@163.com)

    DOI:10.3788/aos201535.0105002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology