Infrared and Laser Engineering, Volume. 50, Issue 10, 20210023(2021)

Numerical simulation and experimental study of multi-pulse laser cladding of B doped Si nano-film

Juan Hong1...2, Yuan Kuai1, Kun Cheng1, Zexin Zhang1, Feng Qian2,3, Jun Qian4, Rulong Chen4 and Honglie Shen2 |Show fewer author(s)
Author Affiliations
  • 1College of Mechanical Engineering, Yancheng Institute of Technology, Yancheng 224051, China
  • 2College of Material Science and Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 221110, China
  • 3Shenzhen Han's Photovoltaic Equipment Co., Ltd, Shenzhen 518103, China
  • 4Jiangsu Runergy Yueda PV Technology Co., Ltd, Yancheng 224000, China
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    In order to study the influence of the thermal accumulation effect of the multi-pulse nanosecond laser on the cladding process of the boron(B) doped silicon(Si) nano-film, the single-temperature model and the three-dimensional finite element method were used to numerically analyze the distribution of temperature field during the interaction process between the laser and the Si film, then the law of temperature field change under multi-pulse coupling was obtained. Compared with a single pulse, the simulation results of the multi-pulse laser action shows that the peak temperature has increased 3.2%, the size of the molten pool has enlarged 18.75%, and the range of the heat-affected zone has also significantly increased; after the laser irradiation, the surface temperature of the cladding layer drops, while the substrate temperature will continue to rise. The multi-pulse heat accumulation effect provides favorable conditions for the B diffusion in the Si nano-film. Finally, through single-pulse and multi-pulse laser cladding experiments, the different conditions of the cladding layers were analyzed, and the general law of the B diffusion assisted by laser cladding was obtained. The technology of laser-assisted B doped Si nano-film will provide the foundation for the applications in semiconductor devices.

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    Juan Hong, Yuan Kuai, Kun Cheng, Zexin Zhang, Feng Qian, Jun Qian, Rulong Chen, Honglie Shen. Numerical simulation and experimental study of multi-pulse laser cladding of B doped Si nano-film[J]. Infrared and Laser Engineering, 2021, 50(10): 20210023

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    Paper Information

    Category: Lasers & Laser optics

    Received: Jan. 12, 2021

    Accepted: --

    Published Online: Dec. 7, 2021

    The Author Email:

    DOI:10.3788/IRLA20210023

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