Optics and Precision Engineering, Volume. 18, Issue 12, 2530(2010)
Calibration of deposition rates of multilayer coatings by sputtering depositions
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ZHANG Li-chao. Calibration of deposition rates of multilayer coatings by sputtering depositions[J]. Optics and Precision Engineering, 2010, 18(12): 2530
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Received: Apr. 6, 2010
Accepted: --
Published Online: Jan. 26, 2011
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CSTR:32186.14.
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