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Acta Optica Sinica, Volume. 41, Issue 23, 2315001(2021)

Pose Correction Method for Micro-Motion Stages Based on Dual-Orthogonal-Camera

Wenjun Chen1,2, Yihe Yin1,2, Yueqiang Zhang1,2、*, Xiaolin Liu1,2, and Qifeng Yu1,2
Author Affiliations
  • 1Institute of Intelligent Optical Measurement and Detection, Shenzhen University, Shenzhen, Guangdong 518000, China
  • 2College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen, Guangdong 518000, China
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    Article index updated:May. 20, 2024

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    Wenjun Chen, Yihe Yin, Yueqiang Zhang, Xiaolin Liu, Qifeng Yu. Pose Correction Method for Micro-Motion Stages Based on Dual-Orthogonal-Camera[J]. Acta Optica Sinica, 2021, 41(23): 2315001

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    Paper Information

    Category: Machine Vision

    Received: Mar. 29, 2021

    Accepted: Jun. 15, 2021

    Published Online: Nov. 29, 2021

    The Author Email: Zhang Yueqiang (yueqiang.zhang@szu.edu.cn)

    DOI:10.3788/AOS202141.2315001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology