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Chinese Optics Letters, Volume. 16, Issue 3, 031201(2018)

Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape

Xiangjun Dai1,2、*, Tianyu Yuan1, Hanyang Jiang2, Xinxing Shao2, Meiling Dai2, Hai Yun1, Fujun Yang2, and Xiaoyuan He2
Author Affiliations
  • 1School of Transportation and Vehicle Engineering, Shandong University of Technology, Zibo 255049, China
  • 2Department of Engineering Mechanics, Southeast University, Nanjing 210096, China
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    Schematic of multi-frequency LSI system.

    Fig. 1. Schematic of multi-frequency LSI system.

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    Original fringes and their spectra: (a) Image with three different frequency fringes; (b) high-frequency fringe; (c) mid-frequency fringe; (d) low-frequency fringe; (e)–(g) spectra corresponding to (b)–(d), respectively.

    Fig. 2. Original fringes and their spectra: (a) Image with three different frequency fringes; (b) high-frequency fringe; (c) mid-frequency fringe; (d) low-frequency fringe; (e)–(g) spectra corresponding to (b)–(d), respectively.

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    Geometry of the beam path.

    Fig. 3. Geometry of the beam path.

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    Results and main analysis procedure.

    Fig. 4. Results and main analysis procedure.

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    Thickness change distribution.

    Fig. 5. Thickness change distribution.

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    3D shape of the thin film subjected to a shearing force.

    Fig. 6. 3D shape of the thin film subjected to a shearing force.

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    Xiangjun Dai, Tianyu Yuan, Hanyang Jiang, Xinxing Shao, Meiling Dai, Hai Yun, Fujun Yang, Xiaoyuan He. Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape[J]. Chinese Optics Letters, 2018, 16(3): 031201

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    Paper Information

    Category: Instrumentation, measurement, and metrology

    Received: Nov. 22, 2017

    Accepted: Jan. 18, 2018

    Published Online: Jul. 13, 2018

    The Author Email: Xiangjun Dai (daixiangjun@sdut.edu.cn)

    DOI:10.3788/COL201816.031201

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology