Chinese Optics Letters, Volume. 14, Issue 7, 073101(2016)

Design of Pd/B4C aperiodic multilayers for 8–12  nm region with flat reflectivity profile

Yiwen Wang1, Qiushi Huang1, Qiang Yi1,2, Li Jiang1, Zhong Zhang1, and Zhanshan Wang1、*
Author Affiliations
  • 1Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
  • 2Institute of Nuclear Physics and Chemistry CAEP, Mianyang 621900, China
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    Figures & Tables(8)
    Designed reflectivity profiles of aperiodic Pd/B4C multilayers operating in the 8.5–10.5 nm waveband with different desired reflectivities.
    Designed reflectivity profiles of aperiodic Pd/B4C multilayers operating from 8.5 to 10.5 nm with a different number of bilayers.
    Reflectivity profile of the aperiodic Pd/B4C multilayer optimized with no interface width (solid), adding 0.6 nm interface width after optimization (dash), and optimized with the fixed interface width of 0.6 nm (dash dot).
    Reflectivity profile of the original aperiodic multilayer optimized with 100% bulk density (solid), the original multilayer calculated with 95% (dash) and 90% bulk density (dash dot), and the multilayer optimized with 90% bulk density (dot).
    Reflectivity profiles of the designed aperiodic multilayer with different layer thickness errors. The multilayer is designed for the waveband of 8.5–10.5 nm.
    Layer thickness distribution of the multilayer designed for the waveband of 8.5–10.5 nm (solid) with 120 bilayers, and the multilayer with random errors of ≤±2% (open).
    Reflectivity profiles of the periodic Pd/B4C multilayer and aperiodic multilayers designed for different bandwidths.
    • Table 1. Parameters of Optimization and the Resulted Reflectivity Profiles for Aperiodic Multilayers with Different Bandwidths

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      Table 1. Parameters of Optimization and the Resulted Reflectivity Profiles for Aperiodic Multilayers with Different Bandwidths

      Waveband (nm)Bilayer number NDesired reflectivity (%)Average reflectivity (%)Deviation (%)
      8.0–11.01203.53.10.29
      8.5–10.51205.55.10.08
      9.0–10.012010.09.50.13
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    Yiwen Wang, Qiushi Huang, Qiang Yi, Li Jiang, Zhong Zhang, Zhanshan Wang. Design of Pd/B4C aperiodic multilayers for 8–12  nm region with flat reflectivity profile[J]. Chinese Optics Letters, 2016, 14(7): 073101

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    Paper Information

    Category: Thin films

    Received: Feb. 4, 2016

    Accepted: May. 16, 2016

    Published Online: Aug. 3, 2018

    The Author Email: Zhanshan Wang (wangzs@tongji.edu.cn)

    DOI:10.3788/COL201614.073101

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