Laser & Optoelectronics Progress, Volume. 57, Issue 15, 153101(2020)
Preparation of SixNy/SiO2 Hard Antireflection Film in Visible Light Band
To improve the anti-friction and anti-scratch ability of the mobile phone display screen and reduce the risk of display screen breakage, a hard antireflection film in visible light band has been prepared in this paper. By gradually increasing the proportion of the thickness of the SixNy film in the total thickness, the deposition process is optimized and the film hardness is improved. According to the design theory of antireflection coating, reasonable film grouping mode and reverse inversion analysis method, the film system design is completed, and the reflectivity of the film is reduced. Testing results show that the average reflectivity of the film is 0.58% and the hardness is 15.99 GPa.
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Dongmei Liu, Pengfei Yue, Xiuhua Fu, Hongyu Cao, Jing Zhang, Shuang Li. Preparation of SixNy/SiO2 Hard Antireflection Film in Visible Light Band[J]. Laser & Optoelectronics Progress, 2020, 57(15): 153101
Category: Thin Films
Received: Nov. 8, 2019
Accepted: Dec. 5, 2019
Published Online: Aug. 4, 2020
The Author Email: Yue Pengfei (yuepengfeifilm@126.com)