Researching | H-type air-bearing motion stage driven by linear motors

Optics and Precision Engineering, Volume. 15, Issue 10, 1540(2007)

H-type air-bearing motion stage driven by linear motors

[in Chinese]¹ and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese]. H-type air-bearing motion stage driven by linear motors[J]. Optics and Precision Engineering, 2007, 15(10): 1540

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Paper Information

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Received: Jan. 22, 2007

Accepted: --

Published Online: Feb. 18, 2008

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Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology