Optics and Precision Engineering, Volume. 15, Issue 10, 1540(2007)

H-type air-bearing motion stage driven by linear motors

[in Chinese]1 and [in Chinese]2
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  • 1[in Chinese]
  • 2[in Chinese]
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    [in Chinese], [in Chinese]. H-type air-bearing motion stage driven by linear motors[J]. Optics and Precision Engineering, 2007, 15(10): 1540

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    Paper Information

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    Received: Jan. 22, 2007

    Accepted: --

    Published Online: Feb. 18, 2008

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