Research Progress of Silicon based Micro Ring Resonators

Linjun HOU; Song FENG; Jie OUYANG; Xiangjian HU; Haojie LI; Shaokai GUO; Yong LIU; Di WANG; Menglin CHEN; Lulu FENG; Ran ZHOU; Jianyang WU; Yuling ZENG; Xinyi HE

doi:10.13765/j.gtxyj.2024.230084

Study On Optical Communications, Volume. 50, Issue 6, 23008401(2024)

Research Progress of Silicon based Micro Ring Resonators

Linjun HOU... Song FENG*, Jie OUYANG, Xiangjian HU, Haojie LI, Shaokai GUO, Yong LIU, Di WANG, Menglin CHEN, Lulu FENG, Ran ZHOU, Jianyang WU, Yuling ZENG and Xinyi HE |Show fewer author(s)

Author Affiliations

School of Science, Xi’an Polytechnic University, Xi’an 710048, China

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Figures & Tables(16)

Fig. 1. Schematic diagram of conventional circular MRR structure

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Fig. 2. Runway type MRR with two bus waveguides and four ports

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Fig. 3. Schematic diagram of optimization of runway type MRR structure

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Fig. 4. Schematic diagram of runway type MRR with DI design

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Fig. 5. Schematic diagram of series/parallel cascaded MRR structure

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Fig. 6. WDM multiplexer based on second-order MRR cascaded structure

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Fig. 7. Schematic diagram of internal and external MRR structure

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Fig. 8. Schematic diagram of MZI embedded MRR array with multiple wavelength inputs

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Fig. 9. Schematic diagram of tunable MRR

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Fig. 10. Schematic diagram of pressure sensor based on MRR

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Fig. 11. MRR vertical view

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Fig. 12. Schematic diagram of a mixed Si₃N₄-LiNbO₃ MRR

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Table 1. Performance parameters of conventional circular MRR

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Table 1. Performance parameters of conventional circular MRR

年份	类型	R/μm	Q值	FSR/nm	参考文献
2012	All－Pass	50.0	7.6×10⁵	－	[9]
2012	All－Pass	2 450.0	2.0×10⁷	0.043	[10]
2015	Add－Drop	1 270.0	1.2×10⁵	0.202	[11]
2015	Add－Drop	8.1	2.0×10⁴	11.350	[12]
2017	All－Pass	115.0	3.7×10⁷	－	[13]
2019	All-Pass	60.0	8.0×10⁵	2.000	[14]
2020	All－Pass	29.0	1.3×10⁶	0.900	[15]
2021	All－Pass	50.0	1.0×10⁶	2.000	[16]
2022	Add－Drop	20.0	7 750.0	8.000	[17]

Table 2. Performance parameters of MRR based SOI

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Table 2. Performance parameters of MRR based SOI

年份	R/μm	Q值	FSR/nm	FWHM/nm	参考文献
2018	20	1.14×10⁶	－	－	[37]
2019	3	9 661.00	28.000	0.16	[39]
2019	9	－	10.400	－	[30]
2019	20	1.38×10⁴	－	0.11	[40]
2021	10	6 276.00	8.160	－	[41]
2023	10	7.40×10⁴	－	－	[42]
2022	20	85 261.00	0.295	0.02	[43]
2021	40	－	－	0.15	[44]
2021	50	10 511.00	－	0.15	[38]

Table 3. Performance parameters of MRR based on III-V family materials

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Table 3. Performance parameters of MRR based on III-V family materials

年份	平台	R/μm	Q值	FSR/nm	FWHM/nm	参考文献
2017	GaN	40	－	4.14	－	[56]
2020	GaN	－	8.00×10³	25.30	0.200 0	[21]
2017	Al₂O₃	150	5.40×10⁴	－	－	[57]
2018	SiON	630	2.20×10⁴	0.39	0.070 0	[58]
2018	Si₃N₄	120	1.05×10⁷	－	－	[59]
2023	Si₃N₄	20	46 552.00	－	－	[23]
2022	Si₃N₄	20	7 750.00	8.00	－	[17]
2022	Si₃N₄	100	4.80×10⁵	－	－	[60]
2023	Si₃N₄	165	4.40×10⁵	1.21	0.003 6	[50]
2023	Si₃N₄	20	7.70×10³	8.00	0.200 0	[49]
2022	Si₃N₄	－	551.60	28.46	2.810 0	[61]
2022	Si₃N₄	10	2.30×10³	19.00	－	[62]
2019	Si₃N₄	56	>10⁶	3.38	－	[63]

Table 4. Performance parameters of MRR based on LN

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Table 4. Performance parameters of MRR based on LN

年份	R/μm	Q值	FSR/nm	FWHM	传输损耗/dB/cm	ER/dB	参考文献
2012	20	1.3×10⁴	5.05	0.118 nm	1.30	－	[68]
2018	－	1.9×10⁵	－	－	0.32	27.00	[69]
2022	130	－	－	4.800 GHz	0.62	34.73	[70]
2021	－	－	－	4.750 GHz	－	34.76	[66]
2019	200	8.0×10⁵	0.83	－	0.33	－	[71]
2022	15	3 706.0	－	－	－	－	[72]
2019	520	－	0.55	0.040 nm	－	8.00	[73]
2020	15	5 546.0	－	－	－	－	[74]
2019	50	5.3×10⁵	－	－	－	－	[75]
2019	－	3.1×10⁴	5.23	0.050 nm	7.50	25.00	[64]
2019	300	1.8×10⁵	0.58	－	0.32	27.00	[67]

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Linjun HOU, Song FENG, Jie OUYANG, Xiangjian HU, Haojie LI, Shaokai GUO, Yong LIU, Di WANG, Menglin CHEN, Lulu FENG, Ran ZHOU, Jianyang WU, Yuling ZENG, Xinyi HE. Research Progress of Silicon based Micro Ring Resonators[J]. Study On Optical Communications, 2024, 50(6): 23008401

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