Acta Optica Sinica, Volume. 42, Issue 14, 1405005(2022)

Single-Order Fork Modulated Groove Position Gratings

Huakui Hu1,2, Fulin Cao1,2, Yue Zhao1,2, and Changqing Xie1、*
Author Affiliations
  • 1Key Laboratory of Microelectronic Devices Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(9)
    Schematic diagrams. (a) FG; (b) FMGPG
    Comparison of far-field diffraction intensities for FMGPG and FG. (a) Diffraction pattern of FMGPG; (b) diffraction pattern of FG; (c) corresponding axis diffraction intensity distribution for Fig. (a); (d) corresponding axis diffraction intensity distribution for Fig. (b)
    Far-field axis diffraction intensity distributions of FMGPG with different R values. (a) R=3 μm; (b) R=7 μm; (c) R=11 μm
    Far-field axis diffraction intensity distributions of FMGPG with different d values. (a) d=40 μm; (b) d=50 μm; (c) d=80 μm
    Far-field axis diffraction intensity distributions of FMGPG with different S values. (a) S=50 mm2; (b) S=80 mm2
    Optical microscope images. (a) FMGPG; (b) FG
    Experimental setup
    Comparison of far-field diffraction intensities for FMGPG and FG in experiment. (a) Diffraction pattern of FMGPG; (b) diffraction pattern of FG; (c) corresponding axis diffraction intensity distribution for Fig. (a); (d) corresponding axis diffraction intensity distribution for Fig. (b)
    Comparison of interference fringe of the vortex generated by FMGPG spread through the cylindrical lens with different TC values. (a) TC is 6; (b) TC is 8; (c) TC is 10; (d) cross-sectional intensity distribution along the red line in Fig. (a); (e) cross-sectional intensity distribution along the red line in Fig. (b); (f) cross-sectional intensity distribution along the red line in Fig. (c)
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    Huakui Hu, Fulin Cao, Yue Zhao, Changqing Xie. Single-Order Fork Modulated Groove Position Gratings[J]. Acta Optica Sinica, 2022, 42(14): 1405005

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    Paper Information

    Category: Diffraction and Gratings

    Received: Jan. 5, 2022

    Accepted: Feb. 21, 2022

    Published Online: Jul. 15, 2022

    The Author Email: Xie Changqing (xiechangqing@ime.ac.cn)

    DOI:10.3788/AOS202242.1405005

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