Acta Photonica Sinica, Volume. 52, Issue 7, 0752307(2023)
High-quality Subwavelength Grating Structures Fabrication on Fused Silica Surfaces by Femtosecond Laser
Fig. 4. Schematic diagram of threshold effect processing principle
Fig. 6. The relationship between LIPSS period and laser fluence under small spot size and low laser fluence conditions
Fig. 8. The correlation trend between pulse number and LIPSS period
Fig. 10. Comparison of different pulse to pulse spacing and periods
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Yang LIU, Xiangping ZHU, Chuan JIN, Xiaomo ZHANG, Wei ZHAO. High-quality Subwavelength Grating Structures Fabrication on Fused Silica Surfaces by Femtosecond Laser[J]. Acta Photonica Sinica, 2023, 52(7): 0752307
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Received: Apr. 6, 2023
Accepted: Jun. 21, 2023
Published Online: Sep. 26, 2023
The Author Email: ZHAO Wei (weiz@opt.ac.cn)