Acta Photonica Sinica, Volume. 52, Issue 7, 0752307(2023)
High-quality Subwavelength Grating Structures Fabrication on Fused Silica Surfaces by Femtosecond Laser
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Fig. 4. Schematic diagram of threshold effect processing principle
Fig. 6. The relationship between LIPSS period and laser fluence under small spot size and low laser fluence conditions
Fig. 8. The correlation trend between pulse number and LIPSS period
Fig. 10. Comparison of different pulse to pulse spacing and periods
Table 1. Parameters of fused silica in experiment
View tableView in ArticleTable 1. Parameters of fused silica in experiment
Parameters Values Optical homogeneity <8×10-6 Coefficient of thermal expansion 0.58×10-6/K（0 ℃ to 200 ℃） Density 2.201 g/cm3 Dimension（radius） 100 mm Thickness 1 mm±0.05 mm
Table 2. Parameters of femtosecond laser micromachining system
View tableView in ArticleTable 2. Parameters of femtosecond laser micromachining system
Parameters Values Centre wavelength 800 nm Pulse duration 100 fs Repetition frequency 10~1 000 Hz Maximum power 5.4 W Beam quality M2≤1.24
Table 3. Parameters of objective
View tableView in ArticleTable 3. Parameters of objective
Parameters Values Wavelength range Visible to NIR Magnification 20× Working distance 2.1 mm Numerical aperture 0.5 Cover glass thickness 0.17 mm
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Yang LIU, Xiangping ZHU, Chuan JIN, Xiaomo ZHANG, Wei ZHAO. High-quality Subwavelength Grating Structures Fabrication on Fused Silica Surfaces by Femtosecond Laser[J]. Acta Photonica Sinica, 2023, 52(7): 0752307
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Received: Apr. 6, 2023
Accepted: Jun. 21, 2023
Published Online: Sep. 26, 2023
The Author Email: ZHAO Wei (weiz@opt.ac.cn)
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