Acta Photonica Sinica, Volume. 52, Issue 7, 0752307(2023)

High-quality Subwavelength Grating Structures Fabrication on Fused Silica Surfaces by Femtosecond Laser

Yang LIU1...2,3, Xiangping ZHU1,2,3, Chuan JIN1,2,3, Xiaomo ZHANG1,2,3, and Wei ZHAO1,23,* |Show fewer author(s)
Author Affiliations
  • 1Xi'an Institute of Optics and Precision Machinics,Chinese Academy of Sciences,Xi'an 710119,China
  • 2State Key Laboratory of Transient Optics and Photonics Technology,Xi'an 710119,China
  • 3University of Chinese Academy of Sciences,Beijing 100049,China
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    Figures & Tables(13)
    Femtosecond laser high-precision machining system
    LIPSS morphology under different laser fluence
    The dependence of period on laser fluence
    Schematic diagram of threshold effect processing principle
    LIPSS quality under different spot sizes
    The relationship between LIPSS period and laser fluence under small spot size and low laser fluence conditions
    LIPSS morphology with different pulse number
    The correlation trend between pulse number and LIPSS period
    LIPSS morphology under different laser repetition
    Comparison of different pulse to pulse spacing and periods
    • Table 1. Parameters of fused silica in experiment

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      Table 1. Parameters of fused silica in experiment

      ParametersValues
      Optical homogeneity<8×10-6
      Coefficient of thermal expansion0.58×10-6/K(0 ℃ to 200 ℃)
      Density2.201 g/cm3
      Dimension(radius)100 mm
      Thickness1 mm±0.05 mm
    • Table 2. Parameters of femtosecond laser micromachining system

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      Table 2. Parameters of femtosecond laser micromachining system

      ParametersValues
      Centre wavelength800 nm
      Pulse duration100 fs
      Repetition frequency10~1 000 Hz
      Maximum power5.4 W
      Beam qualityM2≤1.24
    • Table 3. Parameters of objective

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      Table 3. Parameters of objective

      ParametersValues
      Wavelength rangeVisible to NIR
      Magnification20×
      Working distance2.1 mm
      Numerical aperture0.5
      Cover glass thickness0.17 mm
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    Yang LIU, Xiangping ZHU, Chuan JIN, Xiaomo ZHANG, Wei ZHAO. High-quality Subwavelength Grating Structures Fabrication on Fused Silica Surfaces by Femtosecond Laser[J]. Acta Photonica Sinica, 2023, 52(7): 0752307

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    Paper Information

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    Received: Apr. 6, 2023

    Accepted: Jun. 21, 2023

    Published Online: Sep. 26, 2023

    The Author Email: ZHAO Wei (weiz@opt.ac.cn)

    DOI:10.3788/gzxb20235207.0752307

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