Acta Optica Sinica, Volume. 41, Issue 15, 1511002(2021)

Research on SS-OCT Vibration Measurement Method Based on Ultra-Small GRIN Fiber Probe

Chi Wang1,2, Zhuli Wen1, Jianmei Sun1, Chenye Yang1, Jinhui Li2, Dong Fang2, Xinqun Luan2, and Yewen Xu2、*
Author Affiliations
  • 1Department of Precision Mechanical Engineering, Shanghai University, Shanghai 200444, China
  • 2Science and Technology on Near-Surface Detection Laboratory, Wuxi, Jiangsu 214035, China
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    Figures & Tables(15)
    Schematic diagram of integrated SS-OCT vibration measurement system based on ultra-small GRIN fiber probe
    Development process of ultra-small GRIN optical fiber probe. (a) Precision fiber cutting-fusion machine; (b) micro spot quality detector; (c) probe production process; (d) packaging system and samples
    Schematic diagram of ultra-small GRIN fiber
    Integrated SS-OCT vibration measurement experimental system
    A=0.025 μm, f=10 Hz. (a) Time-varying curve of vibration signal and interference signal; (b) frequency spectrum
    Sine wave with A=1.5 μm, f=1 Hz. (a) Time-varying curve of vibration signal and interference signal; (b) frequency spectrum
    Sine wave with A=2.5 μm, f=5 Hz. (a) Time-varying curve of vibration signal and interference signal; (b) frequency spectrum
    Triangle wave with A=2.5 μm, f=5 Hz. (a) Time-varying curve of vibration signal and interference signal; (b) frequency spectrum
    Sine wave 1 (A=0.5 μm, f=20 Hz) + sine wave 2 (A=0.5 μm, f=40 Hz). (a) Time-varying curve of vibration signal and interference signal; (b) frequency spectrum
    Triangle wave 1 (A=0.5 μm, f=20 Hz) + triangle wave 2 (A=0.5 μm, f=40 Hz). (a) Time-varying curve of vibration signal and interference signal; (b) frequency spectrum
    Sine wave (A=0.5 μm, f=20 Hz) + triangle wave (A=0.5 μm, f=40 Hz). (a) Time-varying curve of vibration signal and interference signal; (b) frequency spectrum
    Sine wave (A=0.5 μm, f=20 Hz) appended to triangle wave (A=0.5 μm, f=40 Hz).(a) Time-varying curve of vibration signal and interference signal; (b) frequency spectrum
    Experimental diagrams of amplitude accuracy. (a) Time-varying curve of vibration signal and interference signal; (b) frequency spectrum
    • Table 1. Experimental data record table (A=0.025 μm, f=10 Hz)

      View table

      Table 1. Experimental data record table (A=0.025 μm, f=10 Hz)

      Number ofexperimentsFitting time domain signalFitting frequency domain signal
      OCTNano-vibratorOCTNano-vibrator
      P-to-P /μmR-squareRMSEP-to-P /μmR-squareRMSEFrequency /HzAmplitude /μmFrequency /HzAmplitude /μm
      10.0440.98720.00180.0490.99930.00059.7660.0229.7660.024
      20.0430.98140.00210.0490.99920.00059.7660.0219.7660.024
      30.0450.98240.00210.0490.99930.00059.7660.0239.7660.025
      40.0490.80350.00860.0490.99930.00059.7660.0249.7660.024
      50.0520.88620.00650.0490.99930.00059.7660.0269.7660.024
      60.0480.97800.00250.0490.99930.00059.7660.0249.7660.024
      70.0440.97860.00230.0490.99930.00059.7660.0229.7660.025
      80.0510.96980.00320.0490.99930.00059.7660.0259.7660.024
      Average value0.0470.0499.7660.0239.7660.024
    • Table 2. Experimental data record table (A=0.010 μm, f=200 Hz)

      View table

      Table 2. Experimental data record table (A=0.010 μm, f=200 Hz)

      Number of experimentsFitting time domain signalFitting frequency domain signal
      OCTNano-vibratorOCTNano-vibrator
      P-to-P /μmP-to-P /μmFrequency /HzFrequency /Hz
      10.0050.006200.2200.2
      20.0050.006200.2200.2
      30.0050.006200.2200.2
      40.0050.006200.2200.2
      50.0050.006200.2200.2
      60.0050.006200.2200.2
      70.0050.006200.2200.2
      80.0040.006200.2200.2
      Average value0.0050.006200.2200.2
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    Chi Wang, Zhuli Wen, Jianmei Sun, Chenye Yang, Jinhui Li, Dong Fang, Xinqun Luan, Yewen Xu. Research on SS-OCT Vibration Measurement Method Based on Ultra-Small GRIN Fiber Probe[J]. Acta Optica Sinica, 2021, 41(15): 1511002

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    Paper Information

    Category: Imaging Systems

    Received: Jan. 5, 2021

    Accepted: Mar. 8, 2021

    Published Online: Aug. 31, 2021

    The Author Email: Xu Yewen (stnsdl@126.com)

    DOI:10.3788/AOS202141.1511002

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