Acta Optica Sinica, Volume. 41, Issue 15, 1511002(2021)

Research on SS-OCT Vibration Measurement Method Based on Ultra-Small GRIN Fiber Probe

Chi Wang1,2, Zhuli Wen1, Jianmei Sun1, Chenye Yang1, Jinhui Li2, Dong Fang2, Xinqun Luan2, and Yewen Xu2、*
Author Affiliations
  • 1Department of Precision Mechanical Engineering, Shanghai University, Shanghai 200444, China
  • 2Science and Technology on Near-Surface Detection Laboratory, Wuxi, Jiangsu 214035, China
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    With the high-precision nano-vibrator as the vibration target to be measured, this paper studied the swept-source optical coherence tomography (SS-OCT) method based on ultra-small gradient index (GRIN) fiber probes for vibration measurement. The working performance of the integrated SS-OCT based on ultra-small GRIN fiber probe was assessed. In theory, the system can measure the maximum peak-to-peak value of vibration up to 12.5 mm and the maximum frequency up to 25 kHz. The corresponding vibration measurement system was developed and the tests and analysis of micro-vibrations were performed. The results show that, with the peak-to-peak value range of 1 nm--5 μm for the nano-vibrator and the frequency range of 1--200 Hz, the integrated SS-OCT vibration measurement system can detect micro-vibrations with a frequency of 1 Hz and a peak-to-peak value of 6 nm or above. For a single-frequency sinusoidal vibration signal with an amplitude of 25 nm and a frequency of 10 Hz, the system has a repeatability-test standard deviation of 0.003. It shows that the integrated SS-OCT system based on the ultra-small GRIN fiber probe has the feasibility of measuring micro-vibrations, which provides an experimental basis for further research on its application in precise measurement fields such as micro-vibrations and micro-displacements.

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    Chi Wang, Zhuli Wen, Jianmei Sun, Chenye Yang, Jinhui Li, Dong Fang, Xinqun Luan, Yewen Xu. Research on SS-OCT Vibration Measurement Method Based on Ultra-Small GRIN Fiber Probe[J]. Acta Optica Sinica, 2021, 41(15): 1511002

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    Paper Information

    Category: Imaging Systems

    Received: Jan. 5, 2021

    Accepted: Mar. 8, 2021

    Published Online: Aug. 31, 2021

    The Author Email: Xu Yewen (stnsdl@126.com)

    DOI:10.3788/AOS202141.1511002

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