[1] [1] BRUSSEL H, PEIRS J, REYNAERTS D, et al.. Assembly of microsystems ［J］. Annals of the ClRP, 2000, 49(2): 451-472.

[2] [2] CEDRIC C, ARNAUD H, NICOLAS C. Micromanipulation and micro-assembly systems ［C］. IEEE/RAS International Advanced Robotics Programm, 2006: 1-5.

[3] [3] WANG X J, WANG X D, YAO G J, et al.. Automatic micro-bonding technology of capillaries with adhesives ［C］. 6th International Conference on Electronic Packaging Technology, 2005: 1-5.

[4] [4] TANIKAWA T, HASHIMOTO Y, ARAI T. Micro drops for adhesive bonding of microassemblies and making a 3-D structure “micro scarecrow” ［C］. Proceedings of the 1998 EEE/RSJ Intl. Conference on Intelligent Robots and Systems Victoria, 1998: 776-781.

[5] [5] YUSOF A, ZENGERLE R, KOLTAY P. Towards a microfluidic dispenser chip for printing single cells ［C］. MEMS 2011, Cancun, MEXICO, 2011: 1059-1062.

[6] [6] ADITYA N D, JEONGSIK S, DAN O P, et al.. On the Precision Alignment and Hybrid Assembly Aspects in Manufacturing of a Microspectrometer ［C］. IEEE International Conference on Robotics and Automation, 2008: 959-966.

[7] [7] CHEN G L, HUANG X H, ZHOU Z D. Micro-assembly robot system ［J］. Journal of Mechanical Engineering, 2009, 45(2): 288-293. (in Chinese)

[8] [8] LOU ZH F, WANG X D, YOU B, et al.. Pressing-fitting technology and instrument for precision small parts ［J］. Opt. Precision Eng., 2015, 23(6): 1605-1611. (in Chinese)

[9] [9] DAVID H, MICHAEL G. Robotic micro-assembly of microparts using a piezogripper ［C］. IEEE/RSJ International Conference on Intelligent Robots and Systems, 2008: 4042-4047.

[10] [10] TAMIO T, TATSUO A. Development of a micro-manipulation system having a two-fingered micro-hand ［J］. Fusion Science and Technology, 2009, 55: 337-342.

[11] [11] ZHANG X W, WANG X D, LUO Y, et al.. Measurement and assembly of trans-scale miniature parts ［J］.Nanotechnology and Precision Engineering, 2012, 20(7): 1542-1550. (in Chinese)

[12] [12] BENJAMIN P, YVES B, JOHN T W. Design of an adaptive scanning optical microscope for simultaneous large field of view and high resolution ［C］. International Conference on Robotics and Automation, 2005: 460-465.

[13] [13] LI H P, XING D P, ZHANG ZHT, et al..Micro-assembly robot system with multiple manipulators based on macro-micro motion mechanism ［J］. Robot, 2015, 37(1): 35-42. (in Chinese)

[14] [14] SHI Y L, LI F D, YANG X, et al.. PL class adhesive dispensing approach for micro bonding ［J］.Opt. Precision Eng., 2012, 20(12): 2744-2750. (in Chinese)