Optics and Precision Engineering, Volume. 22, Issue 10, 2708(2014)
Quality factor measurement of vacuum-packaged microgyroscopes
[2] [2] SCHOFIELD A R, TRUSOV A A, SHKEL A M. Versatile vacuum packaging for experimental study of resonant MEMS [C]. Micro Electro Mechanical System(MEMS), 2010 IEEE 23rd International Conference, 2010: 516-519.
[5] [5] NIEDERMAYER A O, BRUNNMAIER T V, SELL J, et al.. Methods for the robust measurement of the resonant frequency and quality factor of significantly damped resonating devices[J]. Meas.Sci. Technol., 2012, 23 085107.
[6] [6] RAJAMANI V, BUNTING C F, WEST J C. Differences in quality factor estimation in frequency and time domain [C]. Electromagnetic Compatibility(APEMC), 2012:505-508.
[7] [7] JEONG C, SEOK S, LEE B, et al.. A study on resonant frequency and Q factor tunings for MEMS vibratory gyroscopes[J]. J. Micromech. Microeng, 2004,14(2004):1530-1536.
[8] [8] BRUSCHI P, NANNINI A P F. Electrical measurements of the quality factor of microresonators and its dependence on the pressure[J]. Sensors and Actuators A, 2004, 114:21-29.
[9] [9] WANG L Y, DU X H, SU Y ZH, et al.. Accuracy analysis of quality factor measurement based on time domain method for MEMS resonators[C]. The 3rd International Conference of CSMNT, 2012.
[10] [10] MATHIAS H, PARRAIN F, GILLES J P, et al.. Architecture for integrated MEMS resonators quality factor measurement[J]. DTIP of MEMS & MOEMS, 2007.
[11] [11] BRAGHIN F, RESTA F, LEO E, et al.. Nonlinear dynamics of vibrating MEMS [J]. Sensors and Actuators A, 2007, 134: 98-108.
[12] [12] SAUKSKI M, AALTONEN L, SALO T, et al.. Interface and control electronics for a bulk micromachined capacitive gyroscope [J]. Sensors and Actuators A, 2008, 147:183-193.
Get Citation
Copy Citation Text
WANG Yu-zhao, TENG Lin, SUN Xiang-zheng, WANG Gang, GUO Zhi-xiang, YU Cai-jia. Quality factor measurement of vacuum-packaged microgyroscopes[J]. Optics and Precision Engineering, 2014, 22(10): 2708
Category:
Received: Jan. 23, 2014
Accepted: --
Published Online: Nov. 6, 2014
The Author Email: Yu-zhao WANG (tinghx@163.com)