Optics and Precision Engineering, Volume. 22, Issue 10, 2708(2014)

Quality factor measurement of vacuum-packaged microgyroscopes

WANG Yu-zhao*... TENG Lin, SUN Xiang-zheng, WANG Gang, GUO Zhi-xiang and YU Cai-jia |Show fewer author(s)
Author Affiliations
  • [in Chinese]
  • show less

    A under-damping second-order system model without excitation was proposed to measure the quality factor(Q factor) for a vacuum packaged microgyroscope. The model was analyzed theoretically and a time decay constant method was presented. Firstly, an initial displacement of the seismic mass was obtained by exciting the microgyroscope to implement a closed loop resonance with a Phase Locked Loop (PLL). By releasing the excitation signal, the vibration amplitude decay curve was then acquired through demodulating the vibrating displacement signal and was transferred to a computer by a Field Programming Gate Array(FPGA) hardware and Matlab GUI software simultaneously. Finally, the Q factor of the vacuum packaged microgyroscope was calculated by exponentially fitting the envelope of decay curve. The experimental results show that the R-square value of the fitted curve reaches up to 99.999% as compared to the measured data and the repeatability of the tested Q factor is 4.03%, much better than that of the frequency sweeping method. Comparing the measurement data of decay constant method and frequency sweeping method, the former shows better measurement accuracy and higher efficiency. The method is also suitable for the measurements of microsensors with high Q factors.

    Tools

    Get Citation

    Copy Citation Text

    WANG Yu-zhao, TENG Lin, SUN Xiang-zheng, WANG Gang, GUO Zhi-xiang, YU Cai-jia. Quality factor measurement of vacuum-packaged microgyroscopes[J]. Optics and Precision Engineering, 2014, 22(10): 2708

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Jan. 23, 2014

    Accepted: --

    Published Online: Nov. 6, 2014

    The Author Email: Yu-zhao WANG (tinghx@163.com)

    DOI:10.3788/ope.20142210.2708

    Topics