Fig. 1. Calibration of influence function

Fig. 2. Self-affine fractal surface

Fig. 3. Surface error of optics in low frequency and high frequency

Fig. 4. PSD diagram of a surface in self-affine fractal

Fig. 5. Flow chart of surface error extrapolation in Zernike analysis

Fig. 6. Flow chart of surface error extrapolation in Laplace’s equation

Fig. 7. Flow chart of surface error extrapolation in Z-L

Fig. 8. Evaluation method of extrapolation in Z-L

Fig. 9. Extrapolation surface error in Z-L

Fig. 10. Extrapolation surface error in Z-L compared with original data

Fig. 11. (a) Influence function and (b) residual error