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Acta Optica Sinica, Volume. 41, Issue 24, 2412003(2021)

Random Error Estimation and Configuration Optimization of Dual-Rotating Compensator-Mueller Matrix Ellipsometer Calibration Experiments

Zhengwei Miao1,2,3, Yuanyuan Tang1,2、*, Kai Wei1,2, and Yudong Zhang1,2
Author Affiliations
  • 1Key Laboratory of Adaptive Optics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
  • 2Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
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    Article index updated:May. 24, 2024

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    Zhengwei Miao, Yuanyuan Tang, Kai Wei, Yudong Zhang. Random Error Estimation and Configuration Optimization of Dual-Rotating Compensator-Mueller Matrix Ellipsometer Calibration Experiments[J]. Acta Optica Sinica, 2021, 41(24): 2412003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 26, 2021

    Accepted: Jul. 4, 2021

    Published Online: Nov. 30, 2021

    The Author Email: Tang Yuanyuan (yytang001@126.com)

    DOI:10.3788/AOS202141.2412003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology