Optics and Precision Engineering, Volume. 25, Issue 11, 2817(2017)

Fabrication of PMMA hard X-ray compound Kinoform lenses

LIU Jing*... YI Fu-ting, SHENG Wei-fan, CHANG Guang-cai and ZHANG Wei-wei |Show fewer author(s)
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    References(14)

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    [3] [3] LIAO K L, HONG Y L, WANG Q SH, et al.. Analysis of tilted multilayer Laue lens with stochastic layer thickness error [J]. Optics Communications, 2014, 325: 111-115.

    [4] [4] LIU J P, SHAO J H, ZHANG S CH, et al.. Simulation and experimental study of aspect ratio limitation in Fresnel zone plates for hard-X-ray optics [J]. Applied Optics, 2015, 54(32): 9630-9636.

    [5] [5] NAZMOV V, MOHR J, GREVING I, et al.. Modified X-ray polymer refractive cross lens with adiabatic contraction and its realization [J]. Journal of Micromechanics and Microengineering, 2015, 25(5): 055010.

    [6] [6] SCHROERC G, KURAPOVA O, PATOMMEL J, et al.. Hard X-ray nanoprobe based on refractive X-ray lenses [J]. Applied Physics Letters, 2005, 87(12): 124103.

    [7] [7] YAN H F. X-ray nanofocusing by kinoform lenses: a comparative study using different modeling approaches [J]. Physical Review B, 2010, 81(7): 075402.

    [8] [8] LIAO K L, HONG Y L, SHENG W F. Optimized short kinoform lenses for hard X-ray nano-focusing [J]. Optics Communications, 2015, 339: 53-60.

    [9] [9] ARISTOV V, GRIGORIEV M, KUZNETSOV S, et al.. X-ray refractive planar lens with minimized absorption [J]. Applied Physics Letters, 2000, 77(24): 4058-4060.

    [10] [10] LIANG J Q, LE Z CH. Fabrication of PMMA compound X-ray lenses [J]. Opt. Precision Eng., 2005, 13(S1): 60-64. (in Chinese)

    [11] [11] CHENG ZH, XU L, CHENG R CH, et al.. Focusing performance of hard X-ray single Kinoform lens [J]. Acta Physica Sinica, 2015, 64(16): 164104. (in Chinese)

    [12] [12] LIU J, ASHMKHAN M, WANG B, et al.. Fabrication and reflection properties of silicon nanopillars by cesium chloride self-assembly and dry etching [J]. Applied Surface Science, 2012, 258(22): 8825-8830.

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    [14] [14] LIAO K L, LIU J, LIANG H, et al.. Sub-500 nm hard X ray focusing by compound long kinoform lenses [J]. Applied Optics, 2016, 55(1): 38-41.

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    LIU Jing, YI Fu-ting, SHENG Wei-fan, CHANG Guang-cai, ZHANG Wei-wei. Fabrication of PMMA hard X-ray compound Kinoform lenses[J]. Optics and Precision Engineering, 2017, 25(11): 2817

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    Paper Information

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    Received: Mar. 22, 2017

    Accepted: --

    Published Online: Jan. 17, 2018

    The Author Email: Jing LIU (liujing1987@ihep.ac.cn)

    DOI:10.3788/ope.20172511.2817

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