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Journal of Inorganic Materials, Volume. 36, Issue 6, 608(2021)

Preparation of Silicon Nanowires and Porous Silicon Composite Structure by Electrocatalytic Metal Assisted Chemical Etching

Lichi CHEN1...2, Yaogong WANG1,2, Wenjiang WANG1,2, Xiaoqin MA1,2, Jingyuan YANG3,*, and Xiaoning ZHANG12 |Show fewer author(s)
Author Affiliations
  • 11. Key Laboratory of Physical Electronics and Devices of the Ministry of Education, Xi’an Jiaotong University, Xi’an 710049, China
  • 22. School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, China
  • 33. Nuclear and Radiation Safety Center, Beijing 100082, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (9)
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    References (23)
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    Figures & Tables(9)
    Schematic drawing of preparation device
    1. Schematic drawing of preparation device

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    SEM morphologies of samples prepared by different methods
    2. SEM morphologies of samples prepared by different methods

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    Effect of AgNO3 concentration on the morphology of SiNWs/PS composites
    3. Effect of AgNO3 concentration on the morphology of SiNWs/PS composites

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    Effect of etching time on the morphology of SiNWs/PS composites
    4. Effect of etching time on the morphology of SiNWs/PS composites

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    Effect of etching current on the morphology of SiNWs/PS composites
    5. Effect of etching current on the morphology of SiNWs/PS composites

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    Comparison of the morphology of samples prepared by different currents at the same scale
    6. Comparison of the morphology of samples prepared by different currents at the same scale

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    Schematic diagram of EMACE method
    7. Schematic diagram of EMACE method

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    Variation of voltage/current between anode and cathode with time during the etching
    8. Variation of voltage/current between anode and cathode with time during the etching

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    Test results of field emission characteristics
    9. Test results of field emission characteristics

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    Lichi CHEN, Yaogong WANG, Wenjiang WANG, Xiaoqin MA, Jingyuan YANG, Xiaoning ZHANG. Preparation of Silicon Nanowires and Porous Silicon Composite Structure by Electrocatalytic Metal Assisted Chemical Etching[J]. Journal of Inorganic Materials, 2021, 36(6): 608

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    Paper Information

    Category: RESEARCH ARTICLE

    Received: Sep. 1, 2020

    Accepted: --

    Published Online: Nov. 25, 2021

    The Author Email: YANG Jingyuan (yjytonghu@163.com)

    DOI:10.15541/jim20200509

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology