Journal of Applied Optics, Volume. 43, Issue 4, 707(2022)
Rapid Ritchey-Common measurement method of large-aperture flat mirror
Figures & Tables(12)
Fig. 3. Relationship between defocus and radius of spherical mirror
Fig. 7. Direct measuring surface,Wave aberration and Restored surface
Table 1. Wavefront restoration under condition of Ritchey angle error
View tableView in ArticleTable 1. Wavefront restoration under condition of Ritchey angle error
波像差 复原 面形/μm 瑞奇角误差/(°) θ RMS −1 −0.1 0 0.1 1 30° <λ/25 PV 0.246 3 0.248 6 0.248 8 0.249 1 0.251 5 RMS 0.028 9 0.029 2 0.029 2 0.029 2 0.029 5 30° <λ/120 PV 0.036 4 0.036 7 0.036 8 0.036 8 0.037 1 RMS 0.006 1 0.006 2 0.006 2 0.006 2 0.006 3 45° <λ/25 PV 0.299 3 0.303 9 0.304 4 0.305 0 0.309 9 RMS 0.032 9 0.033 4 0.033 5 0.033 5 0.034 0 45° <λ/120 PV 0.042 1 0.042 8 0.042 8 0.043 0 0.043 7 RMS 0.007 2 0.007 3 0.007 3 0.007 3 0.007 4
Table 2. Variation of defocus with
FA lengthView tableView in ArticleTable 2. Variation of defocus with
FA length序号 位置偏移/mm 平面镜与焦点距离/mm 离焦量 1 −0.1 799.9 −3.649 8 2 −0.05 799.95 −1.819 4 3 −0.01 799.99 −0.362 8 4 −0.005 799.995 −0.208 4 5 −0.001 799.999 −0.036 2 6 0.001 800.001 0.036 2 7 0.005 800.005 0.181 2 8 0.01 800.01 0.362 4 9 0.05 800.05 1.807 8 10 0.1 800.1 3.604 6
Table 3. Variation of defocus and astigmatism with
Xs -axis angleView tableView in ArticleTable 3. Variation of defocus and astigmatism with
Xs -axis angle序号 绕Xs旋转/(°) 离焦 像散 1 −0.05 0.075 4 0.062 2 −0.01 0.003 1 0.002 4 3 −0.005 0.000 8 0.000 6 4 −0.002 0.000 1 0.000 1 5 0.002 0.000 1 0.000 1 6 0.005 0.000 8 0.000 6 7 0.01 0.003 1 0.002 4 8 0.05 0.075 4 0.062
Table 4. Variation of defocus and astigmatism with
Ys -axis angleView tableView in ArticleTable 4. Variation of defocus and astigmatism with
Ys -axis angle序号 绕Ys旋转/(°) 离焦 像散 1 −0.05 −0.009 2 0.045 2 3 −0.005 −0.000 1 0.000 5 4 −0.002 0 0.000 1 5 0.002 0 0.000 1 6 0.005 −0.000 1 0.000 5 7 0.01 −0.000 4 0.001 8 8 0.05 −0.009 2 0.045 2
Table 5. Restored surface μm
View tableView in ArticleTable 5. Restored surface μm
复原面形 组号 PV RMS 第1组 0.123 3 0.014 3 第2组 0.114 1 0.015 9 第3组 0.102 6 0.017 5 第4组 0.113 7 0.015 7 第5组 0.114 0 0.015 2 5组平均 0.113 5 0.015 7
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Xin LIU, Cong WANG, Yongqiang LIU, Yang YUAN, Xiaolei CHEN, Yu ZHANG, Juanni HAN, Chaofan ZHANG. Rapid Ritchey-Common measurement method of large-aperture flat mirror[J]. Journal of Applied Optics, 2022, 43(4): 707
Paper Information
Category: OPTICAL METROLOGY AND MEASUREMENT
Received: May. 16, 2022
Accepted: --
Published Online: Aug. 8, 2022
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