Journal of Applied Optics, Volume. 43, Issue 4, 707(2022)
Rapid Ritchey-Common measurement method of large-aperture flat mirror
The Ritchey-Common method is one of the main methods to measure the large-aperture flat mirror with small-aperture interferometer. By analyzing the influence of radius of spherical reference mirror, position of flat mirror and error of Ritchey angle on the measurement accuracy in this method, the selection method of the three-parameter was given. Aiming at the inefficient measurement caused by error separation in Ritchey-Common method, a rapid Ritchey-Common measurement method during processing was proposed. The influence of positioning errors such as position and angle of the measured flat mirror on the measurement results was simulated, and the experiments were carried out. The maximum deviation peak-valley value (PV) between this method and the direct measurement method is 0.015 1 μm, and the root-mean-square (RMS) is 0.003 6 μm, which can effectively meet the needs of rapid surface measurement in processing.
Get Citation
Copy Citation Text
Xin LIU, Cong WANG, Yongqiang LIU, Yang YUAN, Xiaolei CHEN, Yu ZHANG, Juanni HAN, Chaofan ZHANG. Rapid Ritchey-Common measurement method of large-aperture flat mirror[J]. Journal of Applied Optics, 2022, 43(4): 707
Category: OPTICAL METROLOGY AND MEASUREMENT
Received: May. 16, 2022
Accepted: --
Published Online: Aug. 8, 2022
The Author Email: