Optics and Precision Engineering, Volume. 12, Issue z1, 284(2004)
Micromachined resonant bulk-silicon accelerometer
[1] [1] ROESSIG T A, HOWE R T, PISANO A P, et al. Surface-micromachined resonant aeeelerometer[C]. 1997 International Conference on Solid-state Sensors and Actuators, June 16-19,1997,859-862.
[2] [2] SESHIA A A, ALANIAPAN M P, ROESSIG T A,et al. A vacuum packaged surface micromachined resonant accelerometer[J]. Journal of Microelectromechanical Systems, 2002,11 (6): 784-793.
[3] [3] BURRER C, ESTEVE J, LORA-TOMAYO. Resonant silicon accelerometers in bulk micromachining technology [J]. Journal of Microelectromechanical Systems, 1996,5 (2):122-130.
Get Citation
Copy Citation Text
[in Chinese], [in Chinese]. Micromachined resonant bulk-silicon accelerometer[J]. Optics and Precision Engineering, 2004, 12(z1): 284