Optics and Precision Engineering, Volume. 12, Issue z1, 284(2004)

Micromachined resonant bulk-silicon accelerometer

[in Chinese]1 and [in Chinese]2
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(3)

    [1] [1] ROESSIG T A, HOWE R T, PISANO A P, et al. Surface-micromachined resonant aeeelerometer[C]. 1997 International Conference on Solid-state Sensors and Actuators, June 16-19,1997,859-862.

    [2] [2] SESHIA A A, ALANIAPAN M P, ROESSIG T A,et al. A vacuum packaged surface micromachined resonant accelerometer[J]. Journal of Microelectromechanical Systems, 2002,11 (6): 784-793.

    [3] [3] BURRER C, ESTEVE J, LORA-TOMAYO. Resonant silicon accelerometers in bulk micromachining technology [J]. Journal of Microelectromechanical Systems, 1996,5 (2):122-130.

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    [1] [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication of micro spiral acceleration switch using UV-LIGA technology[J]. Optics and Precision Engineering, 2010, 18(5): 1152

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    [in Chinese], [in Chinese]. Micromachined resonant bulk-silicon accelerometer[J]. Optics and Precision Engineering, 2004, 12(z1): 284

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    Paper Information

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    Received: Mar. 22, 2004

    Accepted: --

    Published Online: Nov. 3, 2006

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