Micromachined resonant bulk-silicon accelerometer

Optics and Precision Engineering, Volume. 12, Issue z1, 284(2004)

[in Chinese]¹ and [in Chinese]²

Author Affiliations

¹[in Chinese]

²[in Chinese]

show less

Tools

Get Citation

Copy Citation Text

[in Chinese], [in Chinese]. Micromachined resonant bulk-silicon accelerometer[J]. Optics and Precision Engineering, 2004, 12(z1): 284

Download Citation

Paper Information

Category:

Received: Mar. 22, 2004

Accepted: --

Published Online: Nov. 3, 2006

The Author Email:

DOI:

Topics