Infrared and Laser Engineering, Volume. 53, Issue 8, 20240131(2024)

High-precision spectral characteristic measurement and characterization system

Hongyan JIANG1, Bing SUN2, Deying CHEN3, Yiqin JI1,3, Tianhe WANG1, and Rongwei FAN3、*
Author Affiliations
  • 1Tianjin Jinhang Institute of Technical Physics, Tianjin 300308, China
  • 2Academy of Opto-Electronics, China Electronics Technology Group Corporation, Tianjin 300308, China
  • 3School of Astronautics, Harbin Institute of Technology, Harbin 150080, China
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    Figures & Tables(10)
    Schematic diagram of a beam incident on the surface of a sample
    Research plan for high-precision spectral characterization and testing and characterization
    Optical constants of (a) Ta2O5 and (b) SiO2
    Theoretical design transmittance curve of narrow-band filter
    Schematic diagram of ion beam sputtering deposition
    Multi-temperature step annealing
    High precision spectral characteristic test curve
    High precision spectral characteristic testing at different angles
    • Table 1. Processing parameter for preparing Ta2O5 and SiO2 films

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      Table 1. Processing parameter for preparing Ta2O5 and SiO2 films

      ParameterTa2O5SiO2
      Ion beam voltage/V12501250
      Ion beam current/mA600600
      Acceleration voltage/V250250
      E/B150%150%
      Sedimentation rate/nm·s−10.300.20
      Argon gas flow rate/mL·min−11818
      Oxygen flow rate/mL·min−13030
      Base temperature/℃150150
    • Table 2. High precision spectral characteristic test results

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      Table 2. High precision spectral characteristic test results

      Data sourcesCenter wavelength/nmPeak transmittanceHalf height width/nm
      UV3600531.8059.75%1.05
      V-5002531.2057.26%1.10
      High precision test532.0087.23%0.79
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    Hongyan JIANG, Bing SUN, Deying CHEN, Yiqin JI, Tianhe WANG, Rongwei FAN. High-precision spectral characteristic measurement and characterization system[J]. Infrared and Laser Engineering, 2024, 53(8): 20240131

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    Paper Information

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    Received: Mar. 22, 2024

    Accepted: --

    Published Online: Oct. 29, 2024

    The Author Email: FAN Rongwei (fanmmi@163.com)

    DOI:10.3788/IRLA20240131

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