Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Chinese Journal of Lasers, Volume. 37, Issue 10, 2615(2010)

Experimentation of Deposition Rate Control of SiO2 by E-Beam Auto-Sweeping

Wang Ning1,2、*, Wei Chaoyang1, Shao Jianda1, Fan Zhengxiu1, and Yi Kui1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (0)
    Equations (0)
    References (11)
    Tools
    Paper Information
    Topics
    Figures & Tables(0)
    Tools

    Get Citation

    Copy Citation Text

    Wang Ning, Wei Chaoyang, Shao Jianda, Fan Zhengxiu, Yi Kui. Experimentation of Deposition Rate Control of SiO2 by E-Beam Auto-Sweeping[J]. Chinese Journal of Lasers, 2010, 37(10): 2615

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: materials and thin films

    Received: Dec. 18, 2009

    Accepted: --

    Published Online: Sep. 25, 2010

    The Author Email: Ning Wang (shumangy@126.com)

    DOI:10.3788/cjl20103710.2615

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology