Infrared and Laser Engineering, Volume. 49, Issue 2, 213001(2020)

Investigation of AFM tip characterization based on multilayer gratings

Wu Ziruo*, Cai Yanni, Wang Xingrui, Zhang Longfei, Deng Xiao, Cheng Xinbin, and Li Tongbao
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    Wu Ziruo, Cai Yanni, Wang Xingrui, Zhang Longfei, Deng Xiao, Cheng Xinbin, Li Tongbao. Investigation of AFM tip characterization based on multilayer gratings[J]. Infrared and Laser Engineering, 2020, 49(2): 213001

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    Paper Information

    Category: 光电测量

    Received: Nov. 5, 2019

    Accepted: Dec. 15, 2019

    Published Online: Mar. 10, 2020

    The Author Email: Ziruo Wu (ziruo0930@163.com)

    DOI:10.3788/irla202049.0213001

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