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Microelectronics, Volume. 53, Issue 3, 472(2023)

esearch Progress on Mechanical and Electrical Properties of Silicon-Based Ultrathin Flexible Chips

RHONG Min... CHEN Xian, XU Xueliang, TANG Xinyue, ZHANG Zhengyuan and ZHANG Peijian |Show fewer author(s)
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    RHONG Min, CHEN Xian, XU Xueliang, TANG Xinyue, ZHANG Zhengyuan, ZHANG Peijian. esearch Progress on Mechanical and Electrical Properties of Silicon-Based Ultrathin Flexible Chips[J]. Microelectronics, 2023, 53(3): 472

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    Received: Nov. 14, 2022

    Accepted: --

    Published Online: Jan. 3, 2024

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.220457

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology