Influences of Y2O3 dopant content on residual stress, structure, and optical properties of ZrO2 thin films

Qiling Xiao; Shuying Shao; Jianda Shao; Zhengxiu Fan

doi:10.3788/COL20090702.0162

Chinese Optics Letters, Volume. 7, Issue 2, 02162(2009)

Influences of Y2O3 dopant content on residual stress, structure, and optical properties of ZrO2 thin films

Qiling Xiao, Shuying Shao, Jianda Shao, and Zhengxiu Fan

R and D Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 2018002 Graduate University of Chinese Academy of Sciences, Beijing 100049

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Qiling Xiao, Shuying Shao, Jianda Shao, Zhengxiu Fan. Influences of Y2O3 dopant content on residual stress, structure, and optical properties of ZrO2 thin films[J]. Chinese Optics Letters, 2009, 7(2): 02162

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Paper Information

Received: Apr. 8, 2008

Accepted: --

Published Online: Feb. 23, 2009

The Author Email:

DOI:10.3788/COL20090702.0162

Topics

laser devices and laser physics

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