Optics and Precision Engineering, Volume. 20, Issue 4, 796(2012)
Position measuring system in metrological atomic force microscope
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LI Wei, GAO Si-tian, LU Ming-zhen, SHI Yu-shu, DU Hua. Position measuring system in metrological atomic force microscope[J]. Optics and Precision Engineering, 2012, 20(4): 796
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Received: Feb. 25, 2012
Accepted: --
Published Online: May. 11, 2012
The Author Email: Wei LI (liwei@nim.ac.cn)
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