Optics and Precision Engineering, Volume. 20, Issue 4, 796(2012)

Position measuring system in metrological atomic force microscope

LI Wei*... GAO Si-tian, LU Ming-zhen, SHI Yu-shu and DU Hua |Show fewer author(s)
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    LI Wei, GAO Si-tian, LU Ming-zhen, SHI Yu-shu, DU Hua. Position measuring system in metrological atomic force microscope[J]. Optics and Precision Engineering, 2012, 20(4): 796

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    Paper Information

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    Received: Feb. 25, 2012

    Accepted: --

    Published Online: May. 11, 2012

    The Author Email: Wei LI (liwei@nim.ac.cn)

    DOI:10.3788/ope.20122004.0796

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