Acta Photonica Sinica, Volume. 53, Issue 11, 1131001(2024)

Research Progress of Thin Film Devices in the Far Ultraviolet (Invited)

Jinlong ZHANG1...2,3,4,*, Shuangying LI1,2,3,4, Qize WU1,2,3,4, Hongfei JIAO1,2,3,4, Xinbin CHEN1,2,3,4, and Zhanshan WANG1,2,34 |Show fewer author(s)
Author Affiliations
  • 1Institute of Precision Optical Engineering,School of Physics Science and Engineering,Tongji University,Shanghai 200092,China
  • 2MOE Key Laboratory of Advanced Micro-Structured Materials,Tongji University,Shanghai 200092,China
  • 3Shanghai Frontiers Science Center of Digital Optics,Shanghai 200092,China
  • 4Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications,Shanghai 200092,China
  • show less
    Figures & Tables(18)
    Refractive index n and band gap of ultraviolet thin film materials
    Transmittance of common materials in FUV
    Refractive index n and extinction coefficient k of MgF2 obtained by ZUKIC M et al. using a least-squares method
    Refractive index n and extinction coefficient k of MgF2 obtained by Tongji University
    Refractive index n and extinction coefficient k of MgF2 obtained by MARCOS D R et al. using Kramers-Kronig
    Reflectivity of Al+MgF2 mirrors
    Reflectivity of Al+eMgF2 mirrors fabricated at varying substrate temperatures
    Reflectivity of Al+LiF+eMgF2 mirrors stored in 20%,40% and 80% RH
    Reflectivity of Al+LiF mirrors at 110 nm
    Transmittance of narrowband (Al/MgF2)^3 filters prepared by LARRUQUERT J I et al.
    Design and test results of (Al/MgF2)n filter
    Reflectivity of narrowband LaF3/MgF2 multilayers fabricated by ZUKIC M et al
    Reflectivity of narrowband LaF3/MgF2 multilayer designed by WANG Xiaodong et al
    Reflectivity of narrowband LaF3/MgF2 multilayer fabricated by LÓPEZ-REYES P et al
    Reflectivity of narrowband LaF3/MgF2 multilayers fabricated by Tongji
    Reflectivity of Al+LiF+SiC+LiF fabricated by LARRUQUERT J I et al
    Reflectivity of Al+LiF+B4C fabricated by Tongji University
    • Table 1. Optical properties of narrowband LaF3/MgF2 multilayers

      View table
      View in Article

      Table 1. Optical properties of narrowband LaF3/MgF2 multilayers

      Center/nmDesignAngle/(°)ReflectivityFWHM/nmReference
      135.6(MgF2/LaF3354588.3%7.253
      (MgF2/LaF342792.7%1155
      121.6(MgF2/LaF335554%654
      (LaF3/MgF2/LaF3111076%(calculate)1257
      (MgF2/LaF319574%1159
      (LaF3/MgF217MgF2572%860
    Tools

    Get Citation

    Copy Citation Text

    Jinlong ZHANG, Shuangying LI, Qize WU, Hongfei JIAO, Xinbin CHEN, Zhanshan WANG. Research Progress of Thin Film Devices in the Far Ultraviolet (Invited)[J]. Acta Photonica Sinica, 2024, 53(11): 1131001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Apr. 28, 2024

    Accepted: Jul. 2, 2024

    Published Online: Jan. 8, 2025

    The Author Email: ZHANG Jinlong (jinlong@tongji.edu.cn)

    DOI:10.3788/gzxb20245311.1131001

    Topics