Optics and Precision Engineering, Volume. 30, Issue 13, 1572(2022)
Theoretical modeling and displacement response characteristics of V-shaped electrothermal actuator
Figures & Tables(14)
Fig. 3. One-dimensional simplified model of V-shaped electrothermal actuator
Fig. 4. Overall matrix equation for solving electric-thermal model of V-shaped electrothermal actuator
Fig. 6. Temperature distribution of V-shaped electrothermal actuator at different time in theory and simulation
Fig. 7. Transient displacements of V-shaped electrothermal actuator in theory and simulation
Fig. 9. Experimental measurement results of displacement for V-shaped electrothermal actuator
Fig. 10. Curves of transient displacement for V-shaped electrothermal actuator in theory， simulation and experiment
Fig. 11. Loading curves of voltage and displacement-time curves of V-shaped electrothermal actuator in first cycle
Fig. 12. Displacement-time curves of V-shaped electrothermal actuator
Table 1. Structure parameters of V-shaped electrothermal actuator
View tableView in ArticleTable 1. Structure parameters of V-shaped electrothermal actuator
参数 L/µm w/µm θ/（°） h/µm g /µm 数值 1 500 37 1 100 100
Table 2. Thermal and mechanical material parameters of single crystal silicon at room temperature
View tableView in ArticleTable 2. Thermal and mechanical material parameters of single crystal silicon at room temperature
参 数 符号 值 比热容/（J·m-1·K-1） c 787 密度/（kg·m-3） ρd 2 300 导热系数/（W·m-1·K-1） κ0 146 电阻率/（Ω·m） ρ0 2×10-4 热膨胀系数/K-1 α0 2.56×10-6 杨氏模量/GPa E 1.1×1011 泊松比 v 0.28
Tools
Get Citation
Copy Citation Text
Feng LI, Xinjie WANG, Hao CHEN. Theoretical modeling and displacement response characteristics of V-shaped electrothermal actuator[J]. Optics and Precision Engineering, 2022, 30(13): 1572
Paper Information
Category: Micro/Nano Technology and Fine Mechanics
Received: Feb. 26, 2022
Accepted: --
Published Online: Jul. 27, 2022
The Author Email: WANG Xinjie (xjwang@njust.edu.cn)
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20