Optics and Precision Engineering, Volume. 21, Issue 6, 1440(2013)
Microfabrication of MEMS alkali metal vapor cells for chip-scale atomic devices
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YOU Zheng, MA Bo, RUAN Yong, CHEN Shuo, ZHANG Gao-fei. Microfabrication of MEMS alkali metal vapor cells for chip-scale atomic devices[J]. Optics and Precision Engineering, 2013, 21(6): 1440
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Received: Feb. 15, 2013
Accepted: --
Published Online: Jul. 1, 2013
The Author Email: Bo MA (mab11@mails.tsinghua.edu.cn)
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