Optics and Precision Engineering, Volume. 21, Issue 9, 2238(2013)
Adjustments of refractive index and stress of SiO2 films prepared by IBS technology
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LIU Hua-song, WANG Li-shuan, JIANG Yu-gang, JI Yi-qin. Adjustments of refractive index and stress of SiO2 films prepared by IBS technology[J]. Optics and Precision Engineering, 2013, 21(9): 2238
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Received: Apr. 12, 2013
Accepted: --
Published Online: Sep. 25, 2013
The Author Email: Hua-song LIU (liuhuasong@hotmail.com)
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