Optics and Precision Engineering, Volume. 22, Issue 6, 1590(2014)
Temperature measurement and close-loop control of silicon resonant accelerometer
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WANG Fan, DONG Jing-xin, ZHAO Shu-ming. Temperature measurement and close-loop control of silicon resonant accelerometer[J]. Optics and Precision Engineering, 2014, 22(6): 1590
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Received: Dec. 5, 2013
Accepted: --
Published Online: Jun. 30, 2014
The Author Email: Fan WANG (regatest@163.com)