Infrared and Laser Engineering, Volume. 49, Issue 9, 20201035(2020)

Progress of micro-nano fabrication technologies for optical metasurfaces

Yueqiang Hu1...2, Xin Li1, Xudong Wang1, Jiajie Lai1, and Huigao Duan12 |Show fewer author(s)
Author Affiliations
  • 1National Research Center for High-Efficiency Grinding, College of Mechanical and Vehicle Engineering, Hunan University, Changsha 410082, China
  • 2Advanced Manufacturing Laboratory of Micro-nano Optical Devices, Shenzhen Research Institute, Hunan University, Shenzhen 518000, China
  • show less
    References(168)

    [1] V G Veselago. The electrodynamics of substances with simultaneously negative values of ϵ and μ. Physicsm-Uspekhi, 10, 509-514(1968).

    [11] H Tao, W J Padilla, X Zhang. Recent progress in electromagnetic metamaterial devices for terahertz applications. IEEE Journal of Selected Topics in Quantum Electronics, 17, 92-101(2010).

    [14] [14] Krasnok A, Makarov S, Petrov M, et al. Towards alldielectric metamaterials nanophotonics[C]Metamaterials X. International Society f Optics Photonics, 2015, 9502: 950203.

    [15] Y F Yu, A Y Zhu, D R Paniagua. High-transmission dielectric metasurface with 2 pi phase control at visible wavelengths. Laser & Photonics Reviews, 9, 412-418(2015).

    [23] Y Wang, M Zheng, Q Ruan. Stepwise-nanocavity-assisted transmissive color filter array microprints. Research, 2018, 8109054(2018).

    [25] B Sain, C Meier, T Zentgraf. Nonlinear optics in all-dielectric nanoantennas and metasurfaces: a review. Advanced Photonics, 1, 024002(2019).

    [27] W Zang, Q Yuan, R Chen. Chromatic dispersion manipulation based on metalenses. Advanced Materials, 32, 1904935(2020).

    [28] Y Hu, X Wang, X Luo. All-dielectric metasurfaces for polarization manipulation: principles and emerging applications. Nanophotonics, 9, 3755-3780(2020).

    [30] A Arbabi, E Arbabi, S M Kamali. Miniature optical planar camera based on a wide-angle metasurface doublet corrected for monochromatic aberrations. Nature Communications, 7, 1-9(2016).

    [36] H Butt, Y Montelongo, T Butler. Carbon nanotube based high resolution holograms. Advanced Materials, 24, OP331-OP336(2012).

    [42] M Khorasaninejad, K B Crozier. Silicon nanofin grating as a miniature chirality-distinguishing beam-splitter. Nature Communications, 5, 1-6(2014).

    [52] X Chen, L Huang, H Mühlenbernd. Dual-polarity plasmonic metalens for visible light. Nature Communications, 3, 1-6(2012).

    [53] L Huang, X Chen, H Muhlenbernd. Three-dimensional optical holography using a plasmonic metasurface. Nature Communications, 4, 1-8(2013).

    [61] A Pors, O Albrektsen, I P Radko. Gap plasmon-based metasurfaces for total control of reflected light. Scientific Reports, 3, 1-6(2013).

    [64] D Wen, F Yue, G Li. Helicity multiplexed broadband metasurface holograms. Nature Communications, 6, 1-7(2015).

    [77] K Huang, Z Dong, S Mei. Silicon multi-metaholograms for the broadband visible light. Laser & Photonics Reviews, 10, 500-509(2016).

    [79] R Zhao, B Sain, Q Wei. Multichannel vectorial holographic display and encryption. Light: Science & Applications, 7, 1-9(2018).

    [85] S Shrestha, A C Overvig, M Lu. Broadband achromatic dielectric metalenses. Light: Science & Applications, 7, 1-11(2018).

    [96] A C Overvig, S Shrestha, S C Malek. Dielectric metasurfaces for complete and independent control of the optical amplitude and phase. Light: Science & Applications, 8, 1-12(2019).

    [97] Y Bao, Y Yu, H Xu. Full-colour nanoprint-hologram synchronous metasurface with arbitrary hue-saturation-brightness control. Light: Science & Applications, 8, 1-10(2019).

    [101] Y Hu, L Li, Y Wang. Trichromatic and tripolarization-channel holography with noninterleaved dielectric metasurface. Nano Letters, 20, 994-1002(2019).

    [109] H Sroor, Y W Huang, B Sephton. High-purity orbital angular momentum states from a visible metasurface laser. Nature Photonics, 14, 1-6(2020).

    [110] K Huang, J Deng, H S Leong. Ultraviolet metasurfaces of ~80% efficiency with antiferromagnetic resonances for optical vectorial anti-counterfeiting. Laser & Photonics Reviews, 13, 1800289(2019).

    [111] C Zhang, S Divitt, Q Fan. Low-loss metasurface optics down to the deep ultraviolet region. Light: Science & Applications, 9, 1-10(2020).

    [113] X Ni, A V Kildishev, V M Shalaev. Metasurface holograms for visible light. Nature Communications, 4, 1-6(2013).

    [118] S Chen, Y Cai, G Li. Geometric metasurface fork gratings for vortex-beam generation and manipulation. Laser & Photonics Reviews, 10, 322-326(2016).

    [126] Y Chen, J Gao, X Yang. Direction-controlled bifunctional metasurface polarizers. Laser & Photonics Reviews, 12, 1800198(2018).

    [133] M S Komlenok, S G Tikhodeev, T Weiss. All-carbon diamond/graphite metasurface: Experiment and modeling. Applied Physics Letters, 113, 041101(2018).

    [137] R Drevinskas, M Beresna, J Zhang. Ultrafast laser-induced metasurfaces for geometric phase manipulation. Advanced Optical Materials, 5, 1600575(2017).

    [138] B Li, X Li, R Zhao. Polarization multiplexing terahertz metasurfaces through spatial femtosecond laser-shaping fabrication. Advanced Optical Materials, 8, 10.1022/adom.2017000(2020).

    [139] Z Wang, T Yang, Y Zhang. Flat lenses based on 2D perovskite nanosheets. Adv Mater, e2001388(2020).

    [142] [142] Yang Dong, Liu Lipu, Yang Hong,et al. Laser micronano threedimensional printing[J]. Laser & Optoelectronics Progress, 2018, 55(1): 011411. (in Chinese)

    [144] I Faniayeu, V Mizeikis. Realization of a helix-based perfect absorber for IR spectral range using the direct laser write technique. Optical Materials Express, 7, 1453(2017).

    [145] H Wang, Y Liu, Q Ruan. Off-axis holography with uniform ollumination via 3D printed diffractive optical elements. Advanced Optical Materials, 7, 1900068(2019).

    [146] H Wang, H Wang, W Zhang. Toward near-perfect diffractive optical elements via nanoscale 3D printing. ACS Nano, 7, 04313(2020).

    [154] T Roy, S Zhang, I W Jung. Dynamic metasurface lens based on MEMS technology. APL Photonics, 3, 021302(2018).

    [156] L Liu, X Zhang, Z Zhao. Batch fabrication of metasurface holograms enabled by plasmonic cavity lithography. Advanced Optical Materials, 5, 1700429(2017).

    [159] Y Yao, W Wu. All-dielectric heterogeneous metasurface as an efficient ultra-broadband reflector. Advanced Optical Materials, 5, 1700090(2017).

    [160] [160] Iwanaga M. Largearea metasurfaces produced with nm precision by UV nanoimprint lithography[C]2016 Progress in Electromagic Research Symposium (PIERS). IEEE, 2016: 18571861.

    [164] R M M Hasan, X Luo, J Sun. Rolling nanoelectrode lithography. Micromachines (basel), 11, 070656(2020).

    CLP Journals

    [1] Qian Bi, Zhili Chen, Yuzhao Liu, Li Tang, Yingxue Xi, Weiguo Liu. Evolution of sapphire surface nanostructure with distance of impurity target[J]. Infrared and Laser Engineering, 2021, 50(2): 20200302

    [2] Shaoqi Huang, Zeyuan Song, Mingliang Pan, Yan Long, Bo Dai, Dawei Zhang. Rapid fabrication and characteristics analysis of high-filling-factor microlens array[J]. Infrared and Laser Engineering, 2021, 50(10): 20200476

    [3] Yaoyuan Lei, Qikai Chen, Yitian Liu, Yaoguang Ma. Principles and application progress of mid-infrared metasurfaces in imaging and detection (Invited)[J]. Infrared and Laser Engineering, 2022, 51(3): 20220082

    Tools

    Get Citation

    Copy Citation Text

    Yueqiang Hu, Xin Li, Xudong Wang, Jiajie Lai, Huigao Duan. Progress of micro-nano fabrication technologies for optical metasurfaces[J]. Infrared and Laser Engineering, 2020, 49(9): 20201035

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Special issue-Metasurface empowered manipulation of wavefront

    Received: Jun. 25, 2020

    Accepted: --

    Published Online: Jan. 4, 2021

    The Author Email:

    DOI:10.3788/IRLA20201035

    Topics