Infrared and Laser Engineering, Volume. 49, Issue 9, 20201035(2020)
Progress of micro-nano fabrication technologies for optical metasurfaces
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Yueqiang Hu, Xin Li, Xudong Wang, Jiajie Lai, Huigao Duan. Progress of micro-nano fabrication technologies for optical metasurfaces[J]. Infrared and Laser Engineering, 2020, 49(9): 20201035
Category: Special issue-Metasurface empowered manipulation of wavefront
Received: Jun. 25, 2020
Accepted: --
Published Online: Jan. 4, 2021
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