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International Journal of Extreme Manufacturing, Volume. 6, Issue 2, 22003(2024)

Atomic layer deposition in advanced display technologies: from photoluminescence to encapsulation

Rong Chen1,*... Kun Cao1, Yanwei Wen2, Fan Yang1, Jian Wang1, Xiao Liu1 and Bin Shan2 |Show fewer author(s)
Author Affiliations
  • 1State Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, Hubei,People’s Republic of China
  • 2State Key Laboratory of Materials Processing and Die & Mould Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, Hubei,People’s Republic of China
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    Rong Chen, Kun Cao, Yanwei Wen, Fan Yang, Jian Wang, Xiao Liu, Bin Shan. Atomic layer deposition in advanced display technologies: from photoluminescence to encapsulation[J]. International Journal of Extreme Manufacturing, 2024, 6(2): 22003

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    Paper Information

    Received: Jun. 16, 2023

    Accepted: --

    Published Online: Sep. 6, 2024

    The Author Email: Chen Rong (rongchen@mail.hust.edu.cn)

    DOI:10.1088/2631-7990/ad15f5

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology